SDG: TRXF b Flashcards

1
Q

Overview

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2
Q

Qualitative analysis: Spectra interpretation

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3
Q

Principal peaks of X-ray Spectra according to Atomic Number Z

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4
Q

Step 1:

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5
Q

Step 2:

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6
Q

Step 3

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7
Q

Fingerprint analysis

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8
Q

Evaluating Spectra

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9
Q

K & L Spectral Peaks

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10
Q

Scatter

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11
Q

Rayleigh Scatter

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12
Q

Compton Scatter

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13
Q

Sum Peaks

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14
Q

Escape Peaks

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15
Q

Interferences

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16
Q

Spectral Interferences

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17
Q

Environmental Interferences

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18
Q

Results: peak separation

table

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19
Q

Results: peak separation

poor fitting

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20
Q

Quantitative analysis

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21
Q

Different elements = different sensitivities

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22
Q

Relative Sensitivity factors

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23
Q

Diagram of preparatory steps prior to TXRF analysis

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24
Q

Internal standardization vs. external standardization

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25
Q

Some applications of TXRF

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26
Q

Methods of sample preparation

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27
Q

Sample preparation

special support

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28
Q

Sample preparation Spectra of a quartz

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29
Q

Properties of sample carrier material

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30
Q

Applications for TXRF analysis

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31
Q

Water analysis

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32
Q

Aerosol analysis

definition

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33
Q

Aerosol analysis

origin

34
Q

Aerosol analysis

climate

35
Q
  1. Sampling procedure: impact of size of species
36
Q

Airborne particulates

37
Q

Plant material

38
Q

Vegetable and essential oils

39
Q

Medical and clinical applications

40
Q

Tissue samples

41
Q

High purity chemicals

42
Q

Other applications

43
Q

Silicon wafer analysis

44
Q

Direct TXRF - wafer mapping

45
Q

TXRF @ IMEC

46
Q

Monitoring of process equipment

47
Q

Contamination control: TXRF metrology

48
Q

The problem

of Ruthenium

49
Q

A solution?

50
Q

TXRF Instrumentation

51
Q

By adjustment monochromator

52
Q

Results: spectra

53
Q

Evaluation performance

54
Q

Detection limits for (T)XRF

55
Q

Detection limit

56
Q

Conditions and limitations

57
Q

Pro and Con of TXRF

benefits and drawbacks

58
Q

Pro and Con of TXRF

advantages and requirements

59
Q

Comparison of analysis techniques

60
Q

Performance comparison

61
Q

Detection of light elements

62
Q

Unified measurement angle

63
Q

Vapor Phase Treatment (VPT) - TXRF

64
Q

Pre concentration techniques

65
Q

Preconcentration: general concept

66
Q

Straight -TXRF

67
Q

The Principle of VPD-DC

68
Q

Vapor Phase Decomposition – Droplet Collection

69
Q

Preconcentration Efficiency (Ec )

70
Q

Impact of the VPD-DC Collection Chemistry

71
Q

The copper problem!

72
Q

Matrix effects

73
Q

Conditions and limitations

74
Q

Why SR-TXRF?

75
Q

Brilliance

76
Q

Bending magnet

77
Q

Ultra-clean wafers

78
Q

Wafer Mapping

79
Q

Principles wafer mapping - TXRF

80
Q

Examples WM-TXRF (2)