SDG: TRXF b Flashcards by Thomas Hasiweder

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Overview

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Qualitative analysis: Spectra interpretation

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Principal peaks of X-ray Spectra according to Atomic Number Z

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Step 1:

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Step 2:

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Step 3

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Fingerprint analysis

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Evaluating Spectra

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K & L Spectral Peaks

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Scatter

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Rayleigh Scatter

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Compton Scatter

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Sum Peaks

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Escape Peaks

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Interferences

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Spectral Interferences

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Environmental Interferences

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Results: peak separation

table

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Results: peak separation

poor fitting

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Quantitative analysis

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Different elements = different sensitivities

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Relative Sensitivity factors

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Diagram of preparatory steps prior to TXRF analysis

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Internal standardization vs. external standardization

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Some applications of TXRF

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Methods of sample preparation

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Sample preparation

special support

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Sample preparation Spectra of a quartz

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Properties of sample carrier material

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Applications for TXRF analysis

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Water analysis

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Aerosol analysis

definition

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Aerosol analysis

origin

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Aerosol analysis

climate

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Sampling procedure: impact of size of species

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Airborne particulates

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Plant material

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Vegetable and essential oils

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Medical and clinical applications

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Tissue samples

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High purity chemicals

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Other applications

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Silicon wafer analysis

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Direct TXRF - wafer mapping

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TXRF @ IMEC

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Monitoring of process equipment

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Contamination control: TXRF metrology

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The problem

of Ruthenium

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A solution?

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TXRF Instrumentation

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By adjustment monochromator

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Results: spectra

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Evaluation performance

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Detection limits for (T)XRF

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Detection limit

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Conditions and limitations

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Pro and Con of TXRF

benefits and drawbacks

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Pro and Con of TXRF

advantages and requirements

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Comparison of analysis techniques

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Performance comparison

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Detection of light elements

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Unified measurement angle

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Vapor Phase Treatment (VPT) - TXRF

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Pre concentration techniques

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Preconcentration: general concept

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Straight -TXRF

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The Principle of VPD-DC

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Vapor Phase Decomposition – Droplet Collection

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Preconcentration Efficiency (Ec )

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Impact of the VPD-DC Collection Chemistry

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The copper problem!

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Matrix effects

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Conditions and limitations

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Why SR-TXRF?

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Brilliance

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Bending magnet

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Ultra-clean wafers

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Wafer Mapping

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Principles wafer mapping - TXRF

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Examples WM-TXRF (2)

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