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Instrumental Analytical Chemistry > SDG: TRXF b > Flashcards

SDG: TRXF b Flashcards

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1
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Overview

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2
Q

Qualitative analysis: Spectra interpretation

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3
Q

Principal peaks of X-ray Spectra according to Atomic Number Z

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4
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Step 1:

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5
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Step 2:

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6
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Step 3

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7
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Fingerprint analysis

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8
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Evaluating Spectra

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9
Q

K & L Spectral Peaks

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10
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Scatter

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11
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Rayleigh Scatter

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12
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Compton Scatter

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13
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Sum Peaks

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14
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Escape Peaks

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15
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Interferences

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16
Q

Spectral Interferences

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17
Q

Environmental Interferences

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18
Q

Results: peak separation

table

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19
Q

Results: peak separation

poor fitting

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20
Q

Quantitative analysis

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21
Q

Different elements = different sensitivities

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22
Q

Relative Sensitivity factors

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23
Q

Diagram of preparatory steps prior to TXRF analysis

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24
Q

Internal standardization vs. external standardization

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25
Q

Some applications of TXRF

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26
Q

Methods of sample preparation

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27
Q

Sample preparation

special support

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28
Q

Sample preparation Spectra of a quartz

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29
Q

Properties of sample carrier material

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30
Q

Applications for TXRF analysis

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31
Q

Water analysis

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32
Q

Aerosol analysis

definition

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33
Q

Aerosol analysis

origin

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34
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Aerosol analysis

climate

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35
Q
  1. Sampling procedure: impact of size of species
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36
Q

Airborne particulates

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37
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Plant material

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38
Q

Vegetable and essential oils

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39
Q

Medical and clinical applications

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40
Q

Tissue samples

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41
Q

High purity chemicals

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42
Q

Other applications

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43
Q

Silicon wafer analysis

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44
Q

Direct TXRF - wafer mapping

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45
Q

TXRF @ IMEC

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46
Q

Monitoring of process equipment

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47
Q

Contamination control: TXRF metrology

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48
Q

The problem

of Ruthenium

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49
Q

A solution?

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50
Q

TXRF Instrumentation

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51
Q

By adjustment monochromator

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52
Q

Results: spectra

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53
Q

Evaluation performance

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54
Q

Detection limits for (T)XRF

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55
Q

Detection limit

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56
Q

Conditions and limitations

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57
Q

Pro and Con of TXRF

benefits and drawbacks

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58
Q

Pro and Con of TXRF

advantages and requirements

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59
Q

Comparison of analysis techniques

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60
Q

Performance comparison

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61
Q

Detection of light elements

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62
Q

Unified measurement angle

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63
Q

Vapor Phase Treatment (VPT) - TXRF

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64
Q

Pre concentration techniques

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65
Q

Preconcentration: general concept

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66
Q

Straight -TXRF

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67
Q

The Principle of VPD-DC

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68
Q

Vapor Phase Decomposition – Droplet Collection

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69
Q

Preconcentration Efficiency (Ec )

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70
Q

Impact of the VPD-DC Collection Chemistry

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71
Q

The copper problem!

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72
Q

Matrix effects

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73
Q

Conditions and limitations

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74
Q

Why SR-TXRF?

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75
Q

Brilliance

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76
Q

Bending magnet

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77
Q

Ultra-clean wafers

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78
Q

Wafer Mapping

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79
Q

Principles wafer mapping - TXRF

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80
Q

Examples WM-TXRF (2)

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Instrumental Analytical Chemistry (16 decks)

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