PiC Basics Flashcards
1
Q
Construction of a silicon Photonic Circuit
A
The first step is photolithography: the photoresist is spun on the wafer, the mask is applied with UV light. Then the wafer is put into a developer to remove the exposed parts of the photoresist. Then your circuits are etched. After that, the photoresist is removed and then silicon dioxide deposited by PECVD. After that, the wafer is diced and chips cleaned.
