TohoSpec 3000

Question 1

What does the TohoSpec 3000 do?

Answer 1

Provide accurate film thickness measurements across a vast array of applications

Question 2

What kind of applications can the Toho 3000 measure?

Answer 2

1) LED
2) Solar
3) FPD/ LCD
4) OLED
5) Photomask
6) Power Device
7) SOI
8) Magnetic head for HDD

Question 3

What films can the TohoSpec 3000 measure?

Answer 3

All partially transparent films up to 100nm thick

Question 4

How many layers can the TohoSpec 3000 measure?

Answer 4

Guaranteed 3 layer measurements and in some cases beyond 3 depending on parameters

Question 5

What kind of sample information does the TohoSpec 3000 give?

Answer 5

Sequence of the film stack, film materials, and nominal thickness of each layer

Question 6

What are the substrates of the TohoSpec 3000?

Answer 6

Most smooth or semi-smooth surfaces with some reflectance

Question 7

What is the difference between the TohoSpec 3000 and the TohoSpec 3000T?

Answer 7

The TohoSpec 3000 is for most applications. 512 pixels/100Å~30μ The TohoSpec 3000T is the upgrade model for standard and thick film applications. 1024 pixels/100Å~75μ

Question 8

Wavelength Range

Answer 8

400-800nm (Standard)

400-900nm (Thick film)

Question 9

Film Thickness Range

Answer 9

Standard configuration (10x): 100Å -35μm
ThickFilm Configuration (10x): 500Å - 45μm

Question 10

Measurement Time

Answer 10

Typically < 1 sec/site

Question 11

Data Management

Answer 11

Statistical data analysis, Data export (ASCII)

Question 12

Wafer Sizes

Answer 12

75-200mm

Question 13

Options

Answer 13

1) 5x Objective
2) 50x Objective
3) 100x Objective – 0.75 μm small spot
4) Small aperture system for thick film measurement
5) Color video camera with dedicated 17” flat panel display
6) CD-RW drive
7) Color printer
8) Cleanroom operations manual (hard copy)
9) NanoStandard film thickness standard wafer (6- or 8-inch)