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Toho Technology Flashcards

1
Q

Scan Range

A

Programmable up to 200mm

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2
Q

Measurement Range

A

1 to 4,000MPa (For oxide filler on Si wafer)

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3
Q

Repeatability

A

1.3MPa

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4
Q

Accuracy

A

Less than 2.5% or 1MPa

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5
Q

Minimum Radius

A

2.0m

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6
Q

Maximum Radius

A

33km

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7
Q

Wafer Sizes (mm)

A

25mm, 50mm, 75mm, 100mm, 125mm, 150mm, 200mm

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8
Q

Minimum Scan Step

A

0.02mm

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9
Q

What wave length are the lasers?

A

670nm / 780 nm

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10
Q

What is the laser power rating?

A

4mW

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11
Q

Heating rates

A

up to 25˚c per minute

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12
Q

What does the cooling unit use?

A

LN2

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13
Q

What does WinFLX recalculate?

A

Automatic recalculation of stress when film or substrate thickness is corrected

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14
Q

What is dual wavelength technology?

A

Enables the system to select the wavelength most suitable for challenging films such as silicon nitride

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15
Q

Name 5 data analyst features of WinFLX

A

1) Biaxial modulus of elasticity
2) Linear expansion coefficient
3) File subtraction
4) Trend plotting
5) Calculation of water diffusion coefficient in dielectric film

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16
Q

Name at least 4 stress related problems

A

1) Aluminum stress-induced void
2) Passivation cracking (nitride oxide)
3) Stress-induced dislocations in Si
4) Tungsten Silicide cracking
5) Stress increase in oxides during temperature cycling
6) Matching metallization expansion on GaAs
7) Si cracking due to high film stress

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17
Q

What wafer sizes can be measured?

A

50mm (optional), 75 mm,
100mm, 125mm, 150mm, and
200mm

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18
Q

Maximum Points per scan?

A

1250

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19
Q

Weight of the system? (kg & lbs.)

A

45.5kg & 100lbs.

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20
Q

Scan range for the 4 systems

A

FLX-2320-S: 200mm
FLX-2320-R: 200mm
FLX-3300-T: 300mm
FLX-3300-R: 300mm

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21
Q

Which systems have automatic 3-D mapping?

A

FLX-2320-R and FLX-3300-R

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22
Q

Which systems have manual 3-D mapping?

A

FLX-2320-S and FLX-3300-T

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23
Q

What are the sample sizes of the systems?

A

FLX-2320-S: 75-200mmØ FLX-2320-R: 75-200mmØ
FLX-3300-T: 150mmØ, 200mmØ, 300mmØ
FLX-3300-R: 150mmØ, 200mmØ, 300mmØ

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24
Q

25mm is equal to how many inches?

25
Q

50mm is equal to how many inches?

26
Q

75mm is equal to how many inches

27
Q

100mm is equal to how many inches?

28
Q

125mm is equal to how many inches?

29
Q

150mm is equal to how many inches?

30
Q

200mm is equal to how many inches?

31
Q

7 applications of the FPM series

A

1) Color Filter Pixel Volume on ODF process
2) Main PS and Sub PS on Touch Screen
3) ITO CD Overlay for Mask alignment
4) 3-D/CD inspection for Half-tone Exposure
5) Photo-Resist film thickness
6) Surface form and thickness of RGB filters
7) Volume, Form, Height of pixel for Ink Jet print control
5) photo-resist

31
Q

300mm is equal to how many inches?

32
Q

TACT Time

A

2.5-5 sec FAAM; average 17 sec Glass

33
Q

Prep Uptime

34
Q

Throughput?

A

40k glass/month (4-heads)

35
Q

Height Repro </= 20-30nm (3-

36
Q

Lateral CD/OL Repro

A

</= .2 micron (3- @20x)

37
Q

Head-to-Head Correlation

A

</= 20-30nm (3- )

38
Q

Key technologies

A

1) High-speed SWLI
2) Surface profiling of transparent films
3) Custom 20x or 50x FPM objective
4) Large stage mecha-tronics
5) Micron Absolute positioning
6) High-speed motion with nanometer stability and micron absolute positioning

39
Q

What is the difference between the FP-10 and FP-20?

A

1) The FP-10 Measures up to 400mm x 500mm substrates while the FP-20 measures substrates larger than 400mm x 500mm

2) FP-10: the head is stationary, but the stage moves
FP-20: The Head Moves, but the state is stationary

40
Q

Scan repeatability

A

10A for A type / 15A for X type

41
Q

X and Y repeatability

42
Q

Scan length

A

30mm ~ 90mm with stress option

43
Q

Scan speed (FP Series)

A

1um / sec ~ 25um / sec

44
Q

Sampling Rate (FP series)

A

50 / 100 / 200 / sec

45
Q

Throat Height (FP series)

46
Q

Vertical Range (FP series)

47
Q

L - Stylis (FP series)

A

2um/60 degrees

48
Q

Stylus Force (FP-series)

A

0.5 mg - 15 mg

49
Q

Pattern Recognition

A

Manual/Auto optional

50
Q

Noise isolator (FP series)

51
Q

What does the TohoSpec 3000 do?

A

Provide accurate film thickness measurements across a vast array of applications

52
Q

What kind of applications can the Toho 3000 measure?

A

1) LED
2) Solar
3) FPD/ LCD
4) OLED
5) Photomask
6) Power Device
7) SOI
8) Magnetic head for HDD

53
Q

What films can the TohoSpec 3000 measure?

A

All partially transparent films up to 100nm thick

54
Q

How many layers can the TohoSpec 3000 measure?

A

Guaranteed 3 layer measurements and in some cases beyond 3 depending on parameters

55
Q

What kind of sample information does the TohoSpec 3000 give?

A

Sequence of the film stack, film materials, and nominal thickness of each layer

56
Q

What are the substrates of the TohoSpec 3000?

A

Most smooth or semi-smooth surfaces with some reflectance

57
Q

What is the difference between the TohoSpec 3000 and the TohoSpec 3000T?

A

The TohoSpec 3000 is for most applications. 512 pixels/100A~30u

The TohoSpec 3000T is the upgrade model for standard and thick film applications. 1024 pixels/100A~75u

Toho Technology (4 decks)

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