Brainscape's Knowledge GenomeTM

Browse over 1 million classes created by top students, professors, publishers, and experts.


See full index

Toho Technology > Toho Technology > Flashcards

Toho Technology Flashcards

1
Q

Scan Range

A

Programmable up to 200mm

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
2
Q

Measurement Range

A

1 to 4,000MPa (For oxide filler on Si wafer)

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
3
Q

Repeatability

A

1.3MPa

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
4
Q

Accuracy

A

Less than 2.5% or 1MPa

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
5
Q

Minimum Radius

A

2.0m

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
6
Q

Maximum Radius

A

33km

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
7
Q

Wafer Sizes (mm)

A

25mm, 50mm, 75mm, 100mm, 125mm, 150mm, 200mm

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
8
Q

Minimum Scan Step

A

0.02mm

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
9
Q

What wave length are the lasers?

A

670nm / 780 nm

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
10
Q

What is the laser power rating?

A

4mW

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
11
Q

Heating rates

A

up to 25˚c per minute

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
12
Q

What does the cooling unit use?

A

LN2

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
13
Q

What does WinFLX recalculate?

A

Automatic recalculation of stress when film or substrate thickness is corrected

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
14
Q

What is dual wavelength technology?

A

Enables the system to select the wavelength most suitable for challenging films such as silicon nitride

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
15
Q

Name 5 data analyst features of WinFLX

A

1) Biaxial modulus of elasticity
2) Linear expansion coefficient
3) File subtraction
4) Trend plotting
5) Calculation of water diffusion coefficient in dielectric film

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
16
Q

Name at least 4 stress related problems

A

1) Aluminum stress-induced void
2) Passivation cracking (nitride oxide)
3) Stress-induced dislocations in Si
4) Tungsten Silicide cracking
5) Stress increase in oxides during temperature cycling
6) Matching metallization expansion on GaAs
7) Si cracking due to high film stress

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
17
Q

What wafer sizes can be measured?

A

50mm (optional), 75 mm,
100mm, 125mm, 150mm, and
200mm

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
18
Q

Maximum Points per scan?

A

1250

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
19
Q

Weight of the system? (kg & lbs.)

A

45.5kg & 100lbs.

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
20
Q

Scan range for the 4 systems

A

FLX-2320-S: 200mm
FLX-2320-R: 200mm
FLX-3300-T: 300mm
FLX-3300-R: 300mm

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
21
Q

Which systems have automatic 3-D mapping?

A

FLX-2320-R and FLX-3300-R

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
22
Q

Which systems have manual 3-D mapping?

A

FLX-2320-S and FLX-3300-T

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
23
Q

What are the sample sizes of the systems?

A

FLX-2320-S: 75-200mmØ FLX-2320-R: 75-200mmØ
FLX-3300-T: 150mmØ, 200mmØ, 300mmØ
FLX-3300-R: 150mmØ, 200mmØ, 300mmØ

How well did you know this?
1
Not at all
2
3
4
5
Perfectly
24
Q

25mm is equal to how many inches?

A

1”

25
Q

50mm is equal to how many inches?

A

2”

26
Q

75mm is equal to how many inches

A

3”

27
Q

100mm is equal to how many inches?

A

4”

28
Q

125mm is equal to how many inches?

A

5”

29
Q

150mm is equal to how many inches?

A

6”

30
Q

200mm is equal to how many inches?

A

8”

31
Q

7 applications of the FPM series

A

1) Color Filter Pixel Volume on ODF process
2) Main PS and Sub PS on Touch Screen
3) ITO CD Overlay for Mask alignment
4) 3-D/CD inspection for Half-tone Exposure
5) Photo-Resist film thickness
6) Surface form and thickness of RGB filters
7) Volume, Form, Height of pixel for Ink Jet print control
5) photo-resist

31
Q

300mm is equal to how many inches?

A

12”

32
Q

TACT Time

A

2.5-5 sec FAAM; average 17 sec Glass

33
Q

Prep Uptime

A

> /= 95%

34
Q

Throughput?

A

40k glass/month (4-heads)

35
Q

Height Repro </= 20-30nm (3-

A

.

36
Q

Lateral CD/OL Repro

A

</= .2 micron (3- @20x)

37
Q

Head-to-Head Correlation

A

</= 20-30nm (3- )

38
Q

Key technologies

A

1) High-speed SWLI
2) Surface profiling of transparent films
3) Custom 20x or 50x FPM objective
4) Large stage mecha-tronics
5) Micron Absolute positioning
6) High-speed motion with nanometer stability and micron absolute positioning

39
Q

What is the difference between the FP-10 and FP-20?

A

1) The FP-10 Measures up to 400mm x 500mm substrates while the FP-20 measures substrates larger than 400mm x 500mm

2) FP-10: the head is stationary, but the stage moves
FP-20: The Head Moves, but the state is stationary

40
Q

Scan repeatability

A

10A for A type / 15A for X type

41
Q

X and Y repeatability

A

+/- 2um

42
Q

Scan length

A

30mm ~ 90mm with stress option

43
Q

Scan speed (FP Series)

A

1um / sec ~ 25um / sec

44
Q

Sampling Rate (FP series)

A

50 / 100 / 200 / sec

45
Q

Throat Height (FP series)

A

15 mm

46
Q

Vertical Range (FP series)

A

0-130um

47
Q

L - Stylis (FP series)

A

2um/60 degrees

48
Q

Stylus Force (FP-series)

A

0.5 mg - 15 mg

49
Q

Pattern Recognition

A

Manual/Auto optional

50
Q

Noise isolator (FP series)

A

Equipped

51
Q

What does the TohoSpec 3000 do?

A

Provide accurate film thickness measurements across a vast array of applications

52
Q

What kind of applications can the Toho 3000 measure?

A

1) LED
2) Solar
3) FPD/ LCD
4) OLED
5) Photomask
6) Power Device
7) SOI
8) Magnetic head for HDD

53
Q

What films can the TohoSpec 3000 measure?

A

All partially transparent films up to 100nm thick

54
Q

How many layers can the TohoSpec 3000 measure?

A

Guaranteed 3 layer measurements and in some cases beyond 3 depending on parameters

55
Q

What kind of sample information does the TohoSpec 3000 give?

A

Sequence of the film stack, film materials, and nominal thickness of each layer

56
Q

What are the substrates of the TohoSpec 3000?

A

Most smooth or semi-smooth surfaces with some reflectance

57
Q

What is the difference between the TohoSpec 3000 and the TohoSpec 3000T?

A

The TohoSpec 3000 is for most applications. 512 pixels/100A~30u

The TohoSpec 3000T is the upgrade model for standard and thick film applications. 1024 pixels/100A~75u

Toho Technology (4 decks)

Brainscape helps you reach your goals faster, through stronger study habits.
© 2024 Bold Learning Solutions. Terms and Conditions