FPM Series

Question 1

TACT Time

Answer 1

2.5-5 sec FAAM; average 17 sec Glass

Question 2

Prep Uptime

Answer 2

≥ 95%

Question 3

Throughput

Answer 3

40k glass/month (4-heads)

Question 4

Height Repro

Answer 4

≤ 20-30nm (3-σ)

Question 5

Lateral CD/OL Repro

Answer 5

≤ .2 micron (3-σ @20x)

Question 6

Head-to-Head Correlation

Answer 6

≤ 20-30nm (3-σ)

Question 7

Key technologies

Answer 7

1) High-speed SWLI
2) Surface profiling of transparent films
3) Custom 20x or 50x FPM objective
4) Large stage mecha-tronics
5) Micron Absolute positioning
6) High-speed motion with nanometer stability and micron absolute positioning

Question 8

Applications of the FPM tools

Answer 8

1) Color Filter Pixel Volume on ODF process
2) Main PS and Sub PS on Touch Screen
3) ITO CD Overlay for Mask alignment
4) 3-D/CD inspection for Half-tone Exposure
5) Photo-Resist film thickness
6) Surface form and thickness of RGB filters
7) Volume, Form, Height of pixel for Ink Jet print control

Question 9

What are the FPM series used for?

Answer 9

improve production yield especially in Color Filter, TFT process lines and ODF (One Drop Fill) processes.