FP Series

Question 1

What is the difference between the FP-10 and FP-20?

Answer 1

1)FP-10: Measures up to 400mm x 500mm substratese
FP-2: measures substrates larger than 400mm x 500mm

2) FP-10: the head is stationary, but the stage moves
FP-20: The Head Moves, but the state is stationary

Question 2

Scan repeatability

Answer 2

10Å for A type / 15 Å for X type

Question 3

X and Y repeatability

Answer 3

±2μm

Question 4

Scan length

Answer 4

30mm ~ 90mm with stress option

Question 5

Scan speed

Answer 5

1μm / sec ~ 25μm / sec

Question 6

Sampling Rate

Answer 6

50 / 100 / 200 / sec

Question 7

Throat Height

Answer 7

15 mm

Question 8

Vertical Range

Answer 8

0-130μm

Question 9

L-Stylis

Answer 9

2μm/60 degrees

Question 10

Stylus Force

Answer 10

0.5 mg - 15 mg

Question 11

Pattern Recognition

Answer 11

Manual/Auto optional

Question 12

Noise isolator

Answer 12

Equipped

Question 13

Options for the FP Series

Answer 13

1) CIM Control System
2) Off-line software
3) Auto Pattern Recognition
4) 3-D Imaging
5) Stress Measurement
6) Resistivity 4-Point Probe
7) UPS Unit
8) VLSI Standard
9) Spare L-Stylus