Chp. 7 Summary Flashcards
1
Q
Difference between interdiffusion and self-diffusion
A
The term interdiffusion refers to the migration of impurity atoms; for host atoms, the
term self-diffusion is used.
2
Q
The magnitude of the diffusion coefficient indicates
A
the rate of atomic motion and depends on both host and diffusing species as well as on temperature.
3
Q
The two heat treatments used to diffuse impurities into silicon during integrated
circuit fabrication
A
- predeposition
- drive-in
