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Microelectromechanical Devices > UBCO in house processes > Flashcards

UBCO in house processes Flashcards

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Microelectromechanical Devices (12 decks)

Scaling Effects

Surface Micromachining

Thermal Actuators

Electrostatic Actuators and Sensors

Characterization

Silicon Production and Crystallography

Bulk micromachining

UBCO in house processes

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