Chapter 4 Silicon and Wafer Preparation

Question 1

Crystal Structure

Answer 1

Atoms are arranged spatially in a periodic fashion, repeatable three dimensional pattern over long range of many atoms.

Question 2

Crystal Lattice

Answer 2

How atoms are related in crystal structure by repeating order within a crystal at the atomic level.

Question 3

Amorphous

Answer 3

Structure would be unacceptable for the silicon used in wafers.

Question 4

Unit Cell

Answer 4

1. The most fundamental entity of a crystal material.
2. It is the simplest arrangement of atoms, when repeated in a three dimensional framework.
3. There are seven possible crystal structures.
4. FCC is applicable to silicon.

Question 5

Cubic

Answer 5

4 elements grouped together.

Question 6

Body Centered Cubic

Answer 6

(BCC) 5 elements grouped together.

Question 7

Face Centered Cubic

Answer 7

(FCC) 10 elements grouped together.

Question 8

Polycrystal

Answer 8

The unit cells are no in regular arrangement.

Question 9

Monocrystal

Answer 9

The unit cells are neatly arranged in a three-dimensional, repeatable manner. Providing the most desirable electrical and mechanical properties for silicon wafer processing and performance.

Question 10

Crystal Orientation

Answer 10

Unit cell orientation defines how the silicon crystal structure is physically aligned with the silicon wafer.