5 Flashcards
What is the first step in manufacturing process
Cleaning process
What is the 2nd step in manufacturing
Oxidization
What happens in oxidization during manufacturing
Silicon dioxide grows on top.
3rs step in manufacturing
Photoresist
What happens in photoresist
It is a sacrificial organic polymer sensitive to light. There is a spot of liquuid on top and it gets spun making it distribute acorss the biscuit shape wafer.
4th step of manufacturing
Lithography
5rh step in manufacturing
Etch.
What is etching used with
Hydroflouric acid (HF)
What does HF attack in etching
Silicon dioxide on wafer layer.
6th step in manufacturing
Strip photoresist. Hardened photoresist gets washed off from striping solution.
7rh step in manufacturing
N-well is formed with diffusion or ion implantation
What is purpose of dioxide layer
Protects substrate from showering diffusion and acts as a barrier.
Step 8
Remove dioxide layee
Step 9
Deposit thin layer of gate oxide and polhsilicon
Step 10
Polysilicon patterning. Use same lithography process to pattern Polysilicon