Wet Process Flashcards
Vapor Etch Frame ETI’s
AMAT: 9500, 7500. TEL: 2000, 3600, 4200
Tank Clean Frame ETI’s
3200, 5100, 5200, 5800, 6000, 6200, 6300, 7100, 8000, 8900, 9100, 9200
Tank Clean WS General
04-3DNS_FC31_XX and 04-3TEL_EXP_XXX
Vapor Etch WS General
04-3TEL_CERL_XX and 04-3AMAT_SEL/SICONI_XX
Wafer Clean WS General
04-3DNS_SU31/32/33_XX and 04-3TEL_CELIMD/CELIEX_XX
Wafer Clean Frame ETI’s
1000, 1600, 1800, 2100, 4000, 4700, 7300, 8400, 8500, 9400, 9700
Strip WS General
04-3MTSN_SUPM/HYRDLS_XX and 04-3PSK_SPRA5PL/OMNIS/SPRAXP_XX
Strip Frame ETI’s
1400, 1500, 1700, 2700, 2800, 2900, 7800, 9600
Scrub WS General
04-3DNS_SS32/SS33_XX and 04-3TEL_NS300Z_XX
Scrub Frame ETI’s
2600, 3500, 9900
Supercritical WS General
04-3TEL_CELIMD_XX
Supercritical Frame ETI’s
3000
Copper WS General
04-3AMAT_MUSTM_XX
Copper Frame ETI’s
8200
Backside Etch WS General
04-3LAM_DVP/EOS_XX