Technology

Question 1

Anodic bonding to glass

Answer 1

cleaning and polishing of the glass and silicon surfaces to produce smooth surface finishes. the glass is placed on a hot plate with the silicon above it in ambient air or under vaccum conditions, and a dc voltage is applied. The hot plate is heated to 180-500º and a potential is applied
The electrostatic force pulls the two parts together generating really big pressures

Question 2

Ideal bonding technique

Answer 2

use a infinetly thin adhesive so as to glue the sensor onto a substrate with a thermal expansion identical to that of silicons

Question 3

silicon direct wafer bonding

Answer 3

Fusing wafers by heat and no additional layer is required