Mechanical Flashcards
Mechanisms for the change in resistance of silicon under mechanical stress
Shape of elipsoids for the minimum energy in the conduction band change under stress, the anisotropy is gone -> rearrangement of electrons in the minima
Two accelerometer structures
-lateral accelerometer
- you can use cantilevers and the piezoelectric effect
-Typical accelerometers or acceleration sensors are based on a piezoelectric crystal placed between two capacitor plates, which is fastened to a mass. When the device is accelerated the mass presses on the
crystal generating a small voltage on the plates which is a measure for the acceleration. An advantage of these devices is that they are self generating
and do not require an external power supply.
Where to put piezo resistors in pressure sensors and n or p type silicon for the resistors
- use p type silicon
Read out techniques for mechanical sensors
- piezoelectric - current or voltage
- capacitive - deflection of the diaphragm
- piezoresistive - resistance
Working principle of a gyroscope
Coriolis effect, measure rotational forces
p or n type silicon for the piezo resistors?
p-type silicon, still not sure why, but I think the piezoresistive effect is much higher
Polycrystalline Silicon
Material composed of small grains of silicon crystal s, often showing some texture separated by grain boundaries.
two ways piezoelectric can be used in mechanical sensors
- cantilever
- accelerometers