Semester 1 Flashcards
What is bottom-up fabrication?
An additive process where the structures and features can be built as required from atoms and molecules.
What is top-down fabrication?
a subtractive process based on a bulk crystal material, which is then engineered/modified to form a particular product.
What are some requirements for nanoscale features?
- Controllable sub nanoscale layer deposition.
- Flexible growth modes ( in BU fabrication) towards quantum confinement for 2D, 1D and 0D structures.
- Uniform and conformal deposition.
What is the main technique used for nanoscale features?
Epitaxy
What is epitaxy?
When a semiconductor layer or set of layers are deposited/grown on a bulk crystal substrate wafer, it is considered an epitaxial layer.
What are the two distinct types of epitaxy?
Homoepitaxy and heteroepitaxy
What is homoepitaxy?
The composition of the layer grown is essentially the same as that of the substrate (e.g. Si/Si, n-GaAs etc)
What is heteroepitaxy?
The composition of the layer grown differs from the substrate.
What are the three most common groups of epitaxial semiconductor layers?
Si, III-V and II-IV compound semiconductors
What are the 3 main epitaxial growth techniques?
Liquid phase epitaxy (LPE), vapour phase epitaxy (VPE) and molecular beam epitaxy (MBE).
What is liquid phase epitaxy (LPE)?
Melting liquid to a solid surface
What is vapour phase epitaxy (VPE)?
Transporting vapour to a solid surface
What is molecular beam epitaxy (MBE)?
Transporting solid to a solid surface.
What is MOVPE?
metal organic vapour phase epitaxy
What is chemical vapour deposition (CVD)?
A method to deposit a solid thin film from gaseous phase material.