PCS/DT Flashcards
Diagnostics
1
Q
ADEL
A
ASML Data Exchange Language
2
Q
ADT
A
Advanced Diagnostic Tool
3
Q
BDT
A
Board Dump Tool
4
Q
BRES
A
Basic Remote Equipment Support
5
Q
DART
A
Defectivity Analysis and Reporting Tool
6
Q
DNDM
A
Diagnostic Data Trace Set Manager
7
Q
FAM
A
Fabtop Application Mgr
8
Q
FSE
A
Field Service Engineer 1st line
9
Q
GSC
A
Global Support Center 3rd line
10
Q
HSI
A
Hardware Software Interface
11
Q
LH
A
Lens Heating
12
Q
LOCO
A
Lot Correction
13
Q
LS
A
Level Sensor
14
Q
MBDS
A
Machine Based Diagnostic System
15
Q
MDL
A
Machine Data Logging
16
Q
MIRE
A
Machine Indicated Root Error
17
Q
NCE
A
Non Correctable Error
18
Q
NPI
A
New Product Introduction
19
Q
OCAP
A
Out of Control Action Plan
20
Q
PCS
A
Problem Cause Solution
21
Q
RA
A
Reticle Alignment
22
Q
SD
A
Scheduled Down
23
Q
SDT
A
System Diagnostic Tool
24
Q
SE
A
System Engineering
25
SUSD
Scan Up Scan Down
26
TDT
Trace Definition Tool
27
TS
Test Sequence
28
TSE
Technical Support Engineer 2nd line CS
29
USD
Unscheduled Down
30
ADC script
Automatic Data Collection script
31
PMA
Performance Monitoring Analysis
32
OTAS
Off Tool Application Server - Equipment Perf Server
33
ACMA
Access Manager
34
AID
ASML Internal Data Interface (username password)
35
ELV
Event Log Viewer
36
DAS
Data Acquisition Server - Data storage facility for EUV Source
37
SIRE
SDT Indicated Root Error
38
SSM
Source State Machine
39
DDV
Diagnostic Data Viewer
40
PSCS
Problem Symptom Cause Solution
41
MOPO
Dual Chamber - Master Oscillator Power Oscillator
42
MOPA
Dual Chamber - Master Oscillator Power Amplifier
43
MILLI
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Thousandth
44
Micro
Millionth
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45
Nano
Billionth
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46
Pico
Trillionth
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47
Femto
Quatdrillionth
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48
Laser Triangle
1. Electricity - Pump Energy
2. Gas - Gain Energy
3. Mirrors - Optical Resonator
49
Wavelength
Lambda
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50
Laser Light Spectrum
Defined
51
Laser Triangle
Component Review Image and audio
52
XLA
Dual Chamber Architecture
53
XLA Laser Triangle 2
Different parts
54
HVPS
High Voltage Power Supply
55
SSPPM
Solid State Pulse Power Module
56
RC
Resonant Charger
(has capacitors storing electrical energy)
57
PMS
Power Management System
58
ISS
Input Stage Subrack
59
PDM
Power Distribution Module
60
EMO
Emergency Off - Main Panel
61
LOTO
Lockout Tagout Module
62
GMS
Gas Management System
63
GM
Gas Module
64
TMS
Thermal Management System
65
IMS
Interlock Management System
66
IMS - continued
Interlock Management System
67
Defeatable Interlocks
Laser locks which can be overridden by FSE
68
Non-defeatable Interlocks
Laser locks which cannot be overriden. Usually on back panel of laser enclosure.
69
HHT
Hand Held Terminal
70
TEM
Timing and Energy Module
71
CM
Control Module
72
IM
Interface Module
73
HHT
Hand Held Terminal - Paddle
74
SSIL
Safety Status Indicator Lamp
75
LCP
Laser Control Processor
76
FCP
Fire Control Processor
77
Control System Components
78
Remote IO Clusters
79
80
XLA Control System
81
SAML
Security Ascertion Markup Language
The Security Assertion Markup Language (SAML) standard defines a framework for exchanging security information between online business partners.
82
CSAM
Content and Subscription Manager
## Footnote
Purpose
Manage all content that needs to be sent to an EPS.
Monitor the health status of an EPS
Monitor the update status of an EPS
Managing Content means: register, process and monitor content
Content : Coach, Apps, McAfee Updates, Webcontent, more to come….
83
BRES
Basic Remote Equipment Support
