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John A Johur > PCS/DT > Flashcards

PCS/DT Flashcards

Diagnostics

1
Q

ADEL

A

ASML Data Exchange Language

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2
Q

ADT

A

Advanced Diagnostic Tool

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3
Q

BDT

A

Board Dump Tool

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4
Q

BRES

A

Basic Remote Equipment Support

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5
Q

DART

A

Defectivity Analysis and Reporting Tool

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6
Q

DNDM

A

Diagnostic Data Trace Set Manager

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7
Q

FAM

A

Fabtop Application Mgr

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8
Q

FSE

A

Field Service Engineer 1st line

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9
Q

GSC

A

Global Support Center 3rd line

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10
Q

HSI

A

Hardware Software Interface

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11
Q

LH

A

Lens Heating

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12
Q

LOCO

A

Lot Correction

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13
Q

LS

A

Level Sensor

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14
Q

MBDS

A

Machine Based Diagnostic System

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15
Q

MDL

A

Machine Data Logging

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16
Q

MIRE

A

Machine Indicated Root Error

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17
Q

NCE

A

Non Correctable Error

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18
Q

NPI

A

New Product Introduction

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19
Q

OCAP

A

Out of Control Action Plan

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20
Q

PCS

A

Problem Cause Solution

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21
Q

RA

A

Reticle Alignment

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22
Q

SD

A

Scheduled Down

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23
Q

SDT

A

System Diagnostic Tool

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24
Q

SE

A

System Engineering

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25
Q

SUSD

A

Scan Up Scan Down

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26
Q

TDT

A

Trace Definition Tool

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27
Q

TS

A

Test Sequence

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28
Q

TSE

A

Technical Support Engineer 2nd line CS

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29
Q

USD

A

Unscheduled Down

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30
Q

ADC script

A

Automatic Data Collection script

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31
Q

PMA

A

Performance Monitoring Analysis

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32
Q

OTAS

A

Off Tool Application Server - Equipment Perf Server

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33
Q

ACMA

A

Access Manager

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34
Q

AID

A

ASML Internal Data Interface (username password)

35
Q

ELV

A

Event Log Viewer

36
Q

DAS

A

Data Acquisition Server - Data storage facility for EUV Source

37
Q

SIRE

A

SDT Indicated Root Error

38
Q

SSM

A

Source State Machine

39
Q

DDV

A

Diagnostic Data Viewer

40
Q

PSCS

A

Problem Symptom Cause Solution

41
Q

MOPO

A

Dual Chamber - Master Oscillator Power Oscillator

42
Q

MOPA

A

Dual Chamber - Master Oscillator Power Amplifier

43
Q

MILLI

A

Thousandth

44
Q

Micro

A

Millionth

45
Q

Nano

A

Billionth

46
Q

Pico

A

Trillionth

47
Q

Femto

A

Quatdrillionth

48
Q

Laser Triangle

A
  1. Electricity - Pump Energy
  2. Gas - Gain Energy
  3. Mirrors - Optical Resonator
49
Q

Wavelength

A

Lambda

50
Q

Laser Light Spectrum

A

Defined

51
Q

Laser Triangle

A

Component Review Image and audio

52
Q

XLA

A

Dual Chamber Architecture

53
Q

XLA Laser Triangle 2

A

Different parts

54
Q

HVPS

A

High Voltage Power Supply

55
Q

SSPPM

A

Solid State Pulse Power Module

56
Q

RC

A

Resonant Charger

(has capacitors storing electrical energy)

57
Q

PMS

A

Power Management System

58
Q

ISS

A

Input Stage Subrack

59
Q

PDM

A

Power Distribution Module

60
Q

EMO

A

Emergency Off - Main Panel

61
Q

LOTO

A

Lockout Tagout Module

62
Q

GMS

A

Gas Management System

63
Q

GM

A

Gas Module

64
Q

TMS

A

Thermal Management System

65
Q

IMS

A

Interlock Management System

66
Q

IMS - continued

A

Interlock Management System

67
Q

Defeatable Interlocks

A

Laser locks which can be overridden by FSE

68
Q

Non-defeatable Interlocks

A

Laser locks which cannot be overriden. Usually on back panel of laser enclosure.

69
Q

HHT

A

Hand Held Terminal

70
Q

TEM

A

Timing and Energy Module

71
Q

CM

A

Control Module

72
Q

IM

A

Interface Module

73
Q

HHT

A

Hand Held Terminal - Paddle

74
Q

SSIL

A

Safety Status Indicator Lamp

75
Q

LCP

A

Laser Control Processor

76
Q

FCP

A

Fire Control Processor

77
Q

Control System Components

A
78
Q

Remote IO Clusters

A
79
Q
A
80
Q

XLA Control System

A
81
Q

SAML

A

Security Ascertion Markup Language

The Security Assertion Markup Language (SAML) standard defines a framework for exchanging security information between online business partners.

82
Q

CSAM

A

Content and Subscription Manager

Purpose

Manage all content that needs to be sent to an EPS.

Monitor the health status of an EPS

Monitor the update status of an EPS

Managing Content means: register, process and monitor content

Content : Coach, Apps, McAfee Updates, Webcontent, more to come….

83
Q

BRES

A

Basic Remote Equipment Support

John A Johur (2 decks)

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