Micromachining

Question 1

What are the two terminologies associated with Micromachining

Answer 1

Microelectro-mechanical System (MEMS)
Combines very small mechanical and electrical or electronic components
Refers to its components or its functionality

Microsystem or Microsystem Technology (MST)
Refers to the product – not limited to specific components
Refers to the fabrication technology without a specific bias

Question 2

Applications of microsystems?

Answer 2

Needles
Gyroscopes
Accelerometers
Micrro propulsion systems
Chemical sensors 
Micro fluidics 
Mass spectroscopy
Microphones

Question 3

list the type of devices within a microsystem?

Answer 3

Microsensor
Microactuators
Microstructures and Microcomponents
Microsystems and Microinstruments

Question 4

Microsystem Applications?

Answer 4

Ink Jet Print Head
Gears
Dynamometer Vernier 
Silicon Mirrors
Medical – Micro-surgery

Question 5

What is the base material for microsystems and why?

Answer 5

• Silicon
• Well established etching techniques allow the fabrication of physical features with closed tolerances; thin walls and high aspect ratios when using single-crystal silicon

Question 6

What are the machining techniques ?

Answer 6

• Layering Processes – Layer addition
• Microfabrication versus IC Fabrication
• Forming of cantilevers or similar overhang structures

Question 7

Principle/Method of Microsystem?

Answer 7

Application of a “thick” layer of X-ray radiation-sensitive resist (PMMA - polymethylmethacrylate) onto a conductive substrate

Resist is exposed through a mask to high energy X-ray radiation

Irradiated areas of the positive resist are chemically removed from the substrate surface; 3-D plastic structure remains