Metrology needs Flashcards

1
Q

Measurement of critical dimensions (CDs)

A

CDs are the dimensions of features in semiconductor devices. They are critical for determining the performance and reliability of the devices.

The critical dimensions [CD]of semiconductors are constantly decreasing, which allows for the development of smaller, faster, and more powerful semiconductor chips. More CD in this deck

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2
Q

Measurement of film thickness

A

Film thickness is the thickness of layers in semiconductor devices. It is critical for determining the electrical properties of the devices.

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3
Q

Measurement of dopant concentration

A

Dopant concentration is the concentration of dopants in semiconductor devices. Dopants are impurities that are added to semiconductor materials to control their electrical properties.

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4
Q

Measurement of surface roughness

A

Surface roughness is the roughness of the surface of semiconductor devices. It can affect the performance and reliability of the devices

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5
Q

Measurement of defects

A

Defects are imperfections in semiconductor devices. They can cause the devices to fail.

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6
Q

CD Includes Feature Size

A

The feature size is the smallest feature that can be fabricated on a semiconductor chip. It is typically measured in nanometers (nm). The feature size has been decreasing steadily over the past few decades, and it is now in the range of 10-20 nm.

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7
Q

CD includes Gate Length

A

The gate length is the length of the gate in a transistor. It is also typically measured in nanometers. The gate length is important because it determines the speed of the transistor.

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8
Q

CD includes Pitch

A

The pitch is the distance between adjacent features on a semiconductor chip. It is also typically measured in nanometers. The pitch is important because it determines the density of the transistors on the chip.

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9
Q

CD Includes Line width

A

The line width is the width of a metal line on a semiconductor chip. It is also typically measured in nanometers. The line width is important because it determines the resistance of the metal line.

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10
Q

CD Includes Contact size

A

The contact size is the size of the contact between a metal line and a semiconductor region. It is also typically measured in nanometers. The contact size is important because it determines the resistance of the contact.

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