MEMS

Question 1

Microfabrication Techniques

Answer 1

Deposition
-Chemical vapor deposition (CVD / PECVD / LPCVD)
-Epitaxy
-Oxidation
-Evaporation
-Sputtering
-Spin -coating

Etching
* Wet chemical etching:
* Isotropic
* Anisotropic
* Dry etching:
* Plasma etch
* Reactive Ion etch (RIE, DRIE)

Patterning:
* Photolithography
* X-ray lithography