Reaney- Tunable Thin Film Capacitors Flashcards
What does the application of a large electric field on a ferroelectric material affect?
Strongly affects the temperature of the phase transition and the magnitude of the permittivity maximum. A larger field suppresses the peak in ε and shifts it to higher temperatures. Field can have a greater effect in some directions than others. The room temperature value of permittivity decreases with increasing bias field
Effect on permittivity by applied field use in capacitors
The capacitance of the device alters on the application of an applied field. This principle of voltage dependent capacitance has led to research into tuneable filters
Desirable properties in microwave circuit technology
High dielectric tunability with applied field (Δε/ε > 20%)
Low dielectric loss at microwave frequencies (tanδ < 0.005)
Low to moderate relative permittivity (30 to 1500)
Highly insulating properties
Properties of materials chosen for microwave circuit technology
They have ferroelectric phase transitions below room temperature and so are paraelectric at room temperature. Most room temperature research into Ba1-xSrxTiO3 (BST) based materials where Tc decreases linearly with increasing Sr content at a rate of 3.3K/at% allowing accurate tailoring of the transition temperature
Figure of merit for a tuneable dielectric
K=(εro-εrv)/εroTan(δο)
Where K is the figure of merit
εsubro is the permittivity at zero DC bias field voltage
εsubrv is the permittivity at maximum DC bias field voltage
Tanδsubo is the dielectric loss at zero DC bias
Layout of a thin film capacitor based on BST
Square of BST, top electrode is a small square on top surface. Under is a ground plane and then the silicon substrate. Top and bottom electrodes usually Pt
How is the dielectric for a planar thin film capacitor deposited?
Typically sol-gel, MOCVD or sputtering as used in NvRAMs
Relative permittivity of BST vs DC voltage
Peak at 0V and exponential decrease either side
Why are thin films required?
It is their integration into silicon which will eventually give rise to a mass market. Also the field strength V/m is what induces the changes in permittivity and needs to be high using only small voltages (3V) so need thin layers (1-200nm)
Main problem associated with tuneable filter devices
Allocations require the filter is used at high frequencies (>1GHz and fields). BST has a high loss at these frequencies (0.005) and this is made worse when a field is applied to tune the device.
Problems with tunability measurements
Rarely performed at high operating frequencies and the literature only quotes the low frequency data. Also dielectric loss not factored in and only %tunability considered.
Which deposition method is the only one to give the required crystalline quality of BST thin layers?
MOCVD as the dielectric loss for sputtered or sol-gel films is too high to give K factors close to those necessary for applications
Other materials that could be used instead of BST
Single crystals of SrTiO3 have excellent tunability and low dielectric loss.
Another candidate is CaTiO3 for cryogenic temperatures
As is cadmium pyroniobate Cd2Nb2O7
KTaO3 and (Ln0.5 Na0.5)TiO3 also
(Sr1-xPbx)TiO3 system, Bi2O3-ZnO-Nb2O5 and PbO-Nb2O5 based films
SrTiO3 alternative to BST
For single crystals, εr can be reduced from 20000 to about 2000 at low temperatures by application of 10kV/cm DC field and tanδ around 10^-4. However only recently possible to fabricate films exhibiting similar losses
Cadmium pyroniobate as a BST alternative
Without an applied field the temperature dependence of εr is characterised by occurrence of peaks around 80 and 180K. By applying DC bias peaks are greatly suppressed and finally eliminated at 15kV/cm. So high electric field tunability of permittivity with low dielectric loss at radio frequencies