Godt&Blandet Flashcards
What is the expression for the Fermi-Dirac distribution?
f(E) = 1/(exp(E - EF/(kT))+1)
What is the expression for the electron and hole concentration?
n = NC * exp(-(EC - EF)/(kT))
p = NV * exp(-(EF - EV)/(kT))
What is the charge neutrality condition?
p + ND = n + NA
Free holes p + bound positive charge ND = free electrons n + bound negative charge NA
What is the expression for the number of vacancies in a crystal?
Nv = N * Exp(-Ea/(kT)) N = total number of lattice sites in crystal (Si: 5e22 cm-3)
Ea = activation energy (Si: ~ 2.6 eV)
What is an intermetallic?
A material that has two solid phases that melt to form only one liquid phase.
What is a Frenkel defect?
A vacancy and a nearby self-interstitial.
What is the expression for the number of charged and doubly charged vacancies?
Nv- = Nv * n/ni * exp((Ei - Ev-)/(kT))
Nv– = Nv * (n/ni)^2 * exp((Ei - Ev–)/(kT))
What are the grades of Si and the purity of them?
Metallurgical grade: 95-98% pure Electronic grade 11N: 99.999999999% pure
What is the reaction for creating metallurgical Si?
SiO2 + 2C -> Si + 2CO
What is a boule?
The grown crystal in Czochralski growth.
What is the expression for the 1D analysis of Czochralski growth?
(-kl * A * (dT/dx)l) - (-ks * A * (dT/dx)s) = L * dm/dt
kl and ks = heat conductivity in liquid and solid
A = crossectional area of boule
L = latent heat ( ~ 340cal/g for Si)
What happens if a crystal is pulled faster than the maximum pulling rate?
The heat will not be conducted away fast enough, and the crystal will not solidify in one single crystal.
How is the temperature gradient in the melt minimized?
By rotating the boule and melt in opposite directions.
What happens if the pull rate is too low?
Point defects will agglomerate.
How can the oxygen level in the boule be reduced during the Czochralski process?
By placing the boule in a magnetic field. (The Lorentz force F = qv x B will keep the oxygen atoms away from the boule)
What is the segregation coefficient?
k = Cs/Cl, the impurity concentration at solid surface over the impurity concentration at liquid surface.
How is the crystal heated in float zone growth?
By a high energy RF coil which leads to currents and Joule (resistive) heating.
Name one disadvantage with float zone growth.
Difficult to introduce uniform doping.
What is the solid solubility?
The maximum concentration of an impurity that can be dissolved in another material in equilibrium without forming a compound.
What is quenching?
Quenching is the process where the wafer is cooled rapidly, so that precipitates can not form, and the doping concentration exceeds the solid solubility limit.
What are common impurities in Si?
Al, As, B, O, P, Sb (Al and B are acceptors, B, P and Sb are donors)
What happens at the solid/liquid interface with a segregation coefficient k < 1, and how can that be exploited?
When k < 1, impurities at the interface will diffuse to the liquid region. This can be exploited in zone melting, to purify the boule.
What is the heat of fusion, L?
The latent energy that is released when going from liquid to solid state. (The temperature is constant, but the enthalpy decreases, which corresponds to the latent heat L)
What is necking?
Necking is the extension of the seed which eliminates dislocations caused by thermal shock.
What is a typical oxygen concentration in Si wafers?
10-40 ppm, 1018 cm-3
What is gettering (extrinsic/intrinsic)?
The process of trapping defects and unwanted impurities in gettering sites. Extrinsic: gettering sites are added damaged areas on the back side. Intrinsic: gettering sites are oxygen precipitates.
What are the sources of metal contamination in wafers?
Chemicals, oxidation, resist removal, ion implantation, reactive ion etching.
What are the effects of metal contamination in wafers?
Leak current of pn-junction, reduction in minority carrier lifetime, degradation of device.
Which dopants diffuse faster of intersititals and substitutionals?
Interstitials :)
Hva er fused silica?
Amorf silica (amorphous). Fire oksygenatomer i en pyramide, med et Si-atom i midten. Kovalent bonding.
Hvilke metoder har man for å måle tykkelsen på et oksyd?
- Etsing: Etser vekk en del av oksydlaget, og måler størrelsen på steget, f.eks. med SEM/TEM eller mekanisk scanning med nål.
- Ellipsometri: Sender inn kollimert lys, og ser på refleksjon. Refleksjonen avhenger av polarisasjon og fasevinkel, dvs. tykkelsen.
- Breakdown voltage: Måler strøm med gradvis økende spenning. Ingen ledningsevne før breakdown voltage er nådd. Finner tykkelsen fra dielekstrisk feltstyrke, 12MV/cm.
- CV-karakteristikk. C = eplisonox·A/tox